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Verfahren und Vorrichtung zur interferometrischen Erfassung der Form und/oder Formveraenderung von Prueflingen

Process and device for the interferometric detection of the shape and/or change in shape of objects under test
 
: Evertz, J.; Tutsch, R.; Pfeifer, T.

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Frontpage ()

DE 1995-95019830 A1: 19950124
DE 1995-19524036 A: 19950701
DE 19524036 A1: 19960725
G01B0009
German
Patent, Electronic Publication
Fraunhofer IPT ()

Abstract
The invention relates to a process and a device for the interferometric detection of the shape and/or change in shape of objects under test. The object under test arranged in the measuring arm of an interferometer is illuminated simultaneously by the light of two laser beam sources, and the measuring and reference light bundle (M1, R1) generated by the light of the first laser beam source (2, 21) and interfering with each other is separated spatially from the measuring and reference light bundle (M2, R2) generated by the light of the second laser beam source (3, 22) interfering with each other, and the measuring and reference wave fronts (M1, R1) generated by the light of the first laser beam source (2, 21) interfering with each other is observed by a first matrix camera and the measuring and reference wave fronts (M2, R2) generated by the light having a different wavelength and generated by the second laser beam source (3, 22) is observed by a second matrix camera (14, 33) and the mea suring data of the two observed intensity distributions are detected at the same clock and further processed with the aid of a computer.

: http://publica.fraunhofer.de/documents/PX-38682.html