Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.

Verfahren und Anordnung zur Plasma-Erzeugung

Process and arrangement for generating plasma

: Kozlowski, F.; Steiner, P.; Lang, W.; Sauter, M.; Richter, A.

	DE 1993-4304846 A: 19930217
	DE 1993-4304846 A: 19930217 EP 1994-907553 A: 19940211 WO 1994-EP400 W: 19940211
	DE 4304846 A1: 19940818 EP 685117 A: 19951206
	H01L0033

	German
	Patent, Electronic Publication
	Fraunhofer IZM ()

Abstract
Plasma is generated by applying a voltage to points at a distance from each other on a microporous body. This can take place, for example, by applying a voltage between 50 V and 100 V across a microporous laser of a silicon wafer

: http://publica.fraunhofer.de/documents/PX-38409.html