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Title
Verdampferschiffchen fuer den Einsatz in der PVD-Beschichtungstechnik
Date Issued
1996
Author(s)
Anton, B.
Stoeckl, W.
Kaiser, N.
Patent No
1995-19516233
Abstract
The invention relates to evaporation vessels made of a ceramic or metal substrate material for use in PVD coating technology, said vessels being more resistant to the effect caused by corrosion and erosion by increasing the abrasion resistance of an applied coating and consequently having a longer life. The resistance is preferably achieved by the application of a multi-layer structure composed of a layer of high-fusion boride, carbide or nitride of the IV, V and VI subgroups, or a stable microphase of these compounds or a stable mixture phase of these compounds with aluminium nitride, a layer of the corresponding metal acting as the intermediate layer and/or an insulating layer made of a high-fusion oxide.
Language
de
Patenprio
DE 1995-19516233 A: 19950503