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1994
Conference Paper
Titel
Verbundsubstrat für elektrisch-optische Hybridschaltungen
Abstract
The paper presents the properties of a special kind of dielectric substrates characterized by embedded optic- segmentes (e.g. LiNbO3, KTP, glass), which are suitable to assemble high effective opto-electrical hybrid circuits. The "compound substrates" offer new possibilities to integrate optoelectronic devices and microoptic elements. Customer specified optical waveguide-structures or GRIN-Iens-arrays are realized into the small (as big as necessary to their optical function only) optical areas by ion- or proton- exchange. It's the user's part now to complete this structures for instance to electro- or thermo-optic devices by placement of controlling electrodes, or contacting photodiodes-LED-chips and coupling fibres and using thin-film fabrication-technologies ... to realize receiver- or driver circuits on the ceramic- areas.
Konferenz
Language
German
Tags
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dielectric ceramic
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dielektrische Keramik
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GRIN-lense
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Grinlinse
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hybrid technology
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Hybridtechnologie
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integrated microlense
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integrated optic
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integrierte Mikrolinse
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integrierte Optik
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micro system technology
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microoptics
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Mikrooptik
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Mikrosystemtechnik
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Oberflächenpolitur
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optical waveguides
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optische Wellenleiterstruktur
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substrate semi-finished material
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Substrathalbzeug
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surface polishing