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Verbundsubstrat für elektrisch-optische Hybridschaltungen

: Buß, W.

MESAGO Messe Frankfurt GmbH, Stuttgart:
Der Fraunhofer-Verbund Mikroelektronik. Industrieorientierte Beiträge zu SMT, ASICs und Mikrosystemtechnik '94. Vortragssammlung
Stuttgart, 1994
SMT/ASIC/Hybrid <8, 1994, Nürnberg>
Conference Paper
Fraunhofer IOF ()
dielectric ceramic; dielektrische Keramik; GRIN-lense; Grinlinse; hybrid technology; Hybridtechnologie; integrated microlense; integrated optic; integrierte Mikrolinse; integrierte Optik; micro system technology; microoptics; Mikrooptik; Mikrosystemtechnik; Oberflächenpolitur; optical waveguides; optische Wellenleiterstruktur; substrate semi-finished material; Substrathalbzeug; surface polishing

The paper presents the properties of a special kind of dielectric substrates characterized by embedded optic- segmentes (e.g. LiNbO3, KTP, glass), which are suitable to assemble high effective opto-electrical hybrid circuits. The "compound substrates" offer new possibilities to integrate optoelectronic devices and microoptic elements. Customer specified optical waveguide-structures or GRIN-Iens-arrays are realized into the small (as big as necessary to their optical function only) optical areas by ion- or proton- exchange. It's the user's part now to complete this structures for instance to electro- or thermo-optic devices by placement of controlling electrodes, or contacting photodiodes-LED-chips and coupling fibres and using thin-film fabrication-technologies ... to realize receiver- or driver circuits on the ceramic- areas.