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Title
Vakuumbeschichtungsanlage mit einer Beschichtungskammer und zumindest einer Quellenkammer
Date Issued
2000
Author(s)
Mielsch, G.
Schalausky, R.
Giersch, D.
Scheibe, H.J.
Patent No
1996-19628102
Abstract
Vacuum coating installation includes a coating chamber (1) which can be put under vacuum and accommodates a substrate (13) to be coated, and at least one source chamber (3, 3') which is connected to the coating chamber, and houses a source in the form of a cathode (4) for the source material. The coating chamber is vacuum-tight separable from the source chambers which can be put under vacuum. USE - For substrate coating. ADVANTAGE - Drawbacks (contamination of the coating material, low coating uniformity in the case of larger substrates, poor utilisation of the cathode material) of known installations are eliminated.
Language
de
Patenprio
DE 1996-19628102 A: 19960712