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Vakuumbeschichtungsanlage mit einer Beschichtungskammer und zumindest einer Quellenkammer

Vacuum coating installation - comprising coating chamber vacuum-tight separable from the source chambers which can be put under vacuum.
 
: Mielsch, G.; Schalausky, R.; Giersch, D.; Scheibe, H.J.

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Frontpage ()

DE 1996-19628102 A: 19960712
DE 1996-19628102 A: 19960712
EP 1997-931806 AW: 19970710
WO 1997-EP3653 A: 19970710
DE 19628102 A1: 19980115
EP 910683 B1: 20000202
C23C0014
C23C0014
German
Patent, Electronic Publication
Fraunhofer IWS ()

Abstract
Vacuum coating installation includes a coating chamber (1) which can be put under vacuum and accommodates a substrate (13) to be coated, and at least one source chamber (3, 3') which is connected to the coating chamber, and houses a source in the form of a cathode (4) for the source material. The coating chamber is vacuum-tight separable from the source chambers which can be put under vacuum. USE - For substrate coating. ADVANTAGE - Drawbacks (contamination of the coating material, low coating uniformity in the case of larger substrates, poor utilisation of the cathode material) of known installations are eliminated.

: http://publica.fraunhofer.de/documents/PX-38156.html