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UV-depth lithography and galvanoforming for micro machining
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1996
Journal Article
Title
UV-depth lithography and galvanoforming for micro machining
Author(s)
Löchel, B.
Maciossek, A.
Wagner, B.
Quenzer, H.J.
Journal
Journal of the Electrochemical Society
DOI
10.1149/1.1836415
Language
English
Fraunhofer-Institut für Siliziumtechnologie ISIT
