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UV-depth lithography and galvanoforming for micro machining
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1995
Conference Paper
Titel
UV-depth lithography and galvanoforming for micro machining
Author(s)
Löchel, B.
Maciossek, A.
Wagner, B.
Quenzer, H.J.
Hauptwerk
Electrochemical Microfabrication II. Proceedings
Konferenz
International Symposium Electrochemical Microfabrication 1994
Language
English
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Fraunhofer-Institut fĂĽr Siliziumtechnologie ISIT