Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.

UV-depth lithography and galvanoforming for micro machining

 
: Löchel, B.; Maciossek, A.; Wagner, B.; Quenzer, H.J.

Datta, M.; Sheppard, K.; Dukovic, H.J. ; Electrochemical Society -ECS-:
Electrochemical Microfabrication II. Proceedings : 18th ECS Meeting
Pennington/NJ, 1995 (Electrochemical Society. Proceedings 94-32)
pp.101-111
International Symposium Electrochemical Microfabrication <2, 1994, Miami Beach>
English
Conference Paper
Fraunhofer ISIT ()

: http://publica.fraunhofer.de/documents/PX-38134.html