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1996
Conference Paper
Titel
UV damage threshold of molecular beam deposited fluoride coatings
Abstract
Optical coatings for the ultraviolet spectral region consisting of fluorides have been made by molecular beam deposition in ultrahigh vacuum. The laser induced damage threshold at 1=248 nm of the NdF3, single layers has been improved by means of reactive deposition. It was found that the threshold of fluoride antireflection coatings for 248 nm is significant lower than that of single layers and does not show significant dependence on reactive gas conditions. A surface smoothing has been obtained due to an interrupted growth of very thin sublayers crystallizing in different crystal lattices. The damage threshold of interrupted grown antireflection coatings is somewhat higher than that of a conventional one.