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The use of tetramethylammoniumhydroxide for silicon micromachining
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1991
Conference Paper
Title
The use of tetramethylammoniumhydroxide for silicon micromachining
Author(s)
Schnakenberg, U.
Benecke, W.
Mainwork
Transducers '91. 6th International Conference on Solid-State Sensors and Actuators. Digest of technical papers
Conference
International Conference on Solid-State Sensors and Actuators 1991
Language
English
Fraunhofer-Institut für Siliziumtechnologie ISIT
