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The use of tetramethylammoniumhydroxide for silicon micromachining

 
: Schnakenberg, U.; Benecke, W.

Institute of Electrical and Electronics Engineers -IEEE-:
Transducers '91. 6th International Conference on Solid-State Sensors and Actuators. Digest of technical papers
New York/N.Y., 1991
ISBN: 0-87942-585-7
International Conference on Solid-State Sensors and Actuators <6, 1991, San Francisco/Calif.>
English
Conference Paper
Fraunhofer ISIT ()

: http://publica.fraunhofer.de/documents/PX-38026.html