Publica
Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten. The use of tetramethylammoniumhydroxide for silicon micromachining
| Institute of Electrical and Electronics Engineers -IEEE-:
Transducers '91. 6th International Conference on Solid-State Sensors and Actuators. Digest of technical papers
New York/N.Y., 1991
ISBN: 0-87942-585-7 |
| International Conference on Solid-State Sensors and Actuators <6, 1991, San Francisco/Calif.> |
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| English |
| Conference Paper |
| Fraunhofer ISIT () |