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Umweltschutztechnologie bei CVD-Prozessen

Environmental protection technology in CVD processes
 
: Weber, A.

Deutsche Forschungsgesellschaft für Oberflächenbehandlung e.V. -DFO-:
SURTEC '91. 6. Internationaler Kongreß für Oberflächentechnik
Düsseldorf, 1991
pp.647-662
SURTEC <6, 1991, Berlin>
German
Conference Paper
Fraunhofer IST ()
Abgasreinigung; CVD; environment protection; exhaust cleaning; gas measurement device; Gasmessung; Umweltschutz

Abstract
CVD processes are important techniques for the production of various microelectronic and tool coatings. Due to the frequently toxic gases used in CVD processes the application of exhaust cleaning and gas measurement devices is imperativ in order to guarantee environmental compatibility and save processing. Modem techniques for gas measurement and exhaust cleaning are presented.

: http://publica.fraunhofer.de/documents/PX-37597.html