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Ultraprecision grinding and single point diamond turning of silicon wafers and their characterization

 
: Kerstan, M.; Ehlert, A.; Huber, A.; Helmreich, D.; Beinert, J.; Döll, W.; Schinker, M.

American Society for Precision Engineering -ASPE-:
Proceedings of silicon machining 1998. Spring Topical Meeting
Raleigh/NC: ASPE, 1998
ISBN: 1-88770-619-4
pp.32-35
Spring Topical Meeting on Silicon Machining <1998, Carmel-by-the-Sea/Calif.>
English
Conference Paper
Fraunhofer IWM ()

: http://publica.fraunhofer.de/documents/PX-37342.html