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Ultra-Mikrohärteprüfung im Experiment. Untersuchungen an beschichteten und unbeschichteten Proben

: Scheer, C.; Olaf, J.M.; Schenuit, E.

Materialprüfung 35 (1993), No.10, pp.289-292
ISSN: 0025-5300
Journal Article
Fraunhofer IWM ()
dünne Schicht; Eindruckversuch; Finite-Elemente-Methode (FEM); Härte; Oberfläche; Parameterseparation; Referenzprobe; registrierende Härtemessung; Silizium

Ultra-microhardness test on coated and uncoated specimen. The depth-sensing ultra-microhardness test is an important method for characterizing the mechanical properties of surfaces and layers. This article presents a realization that is produced in series. Experimental results on coated and uncoated specimen are compared to parallelly performed numerical simulations. Results are shown illustrating the additional amount of information of the measured curves compared to the classical hardness tests, e.g. hints to phase transformation or the influence of friction and the possibility to determine elastic or time dependent properties.