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TMAHW etchants for silicon micromachining
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1991
Conference Paper
Titel
TMAHW etchants for silicon micromachining
Author(s)
Schnakenberg, U.
Lange, P.
Benecke, W.
Hauptwerk
Transducers '91. 6th International Conference on Solid-State Sensors and Actuators. Digest of technical papers
Konferenz
International Conference on Solid-State Sensors and Actuators 1991
DOI
10.1109/SENSOR.1991.149008
Language
English
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Fraunhofer-Institut für Siliziumtechnologie ISIT