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Time-resolved diagnosis of processes in PLD of ceramics

: Voss, A.; Kreutz, E.W.; Funken, J.; Alunovic, M.; Sung, H.


Applied surface science (1993), No.69, pp.174-179 : Abb.,Lit.
ISSN: 0169-4332
Journal Article
Fraunhofer ILT ()
ceramic; electron-temperature; photography; substrate; vapour deposition

The material transfer of ceramics (Alsub2Osub3, ZrOsub3) in pulsed laser deposition (PLD) is studied as a function of pulsed CO2 laser radiation parameters and processing variables. Timeresolved measurements of the composition and the electrontemperature as well as the geometry and dynamics of the vapour/plasma were obtained by emission spectroscopy and high-speed photography. The vapour/plasma states are related to the structures of ceramic films grown on metallic substrates.