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Time constants and reaction cross sections characterizing film deposition by beam-induced polymerization

: Fritzsche, C.R.


Journal of applied physics 60 (1986), No.6, pp.2182-2184 : Abb.,Tab.,Lit.
ISSN: 0021-8979
ISSN: 1089-7550
Journal Article
Fraunhofer IAF ()
Dünnschicht-Technik; Ionenstrahl-Abscheidung; Polymerisation

Experimental values are reported for parameters employed in the theory of film deposition from organic vapors by irradiation with charged particles. Direct evidence is given for the known assumption that for ion-beam-induced deposition the activation cross section is much larger than for electron-beam-induced deposition. It is shown that this cross section is a complex quantity presumably including energy transfer within the macromolecules and excitation by secondary particles. The other parameters were found to be consistent with their simple interpretations in the theory as the lifetime of an activated state and area per polymerization center. (IAF)