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Three-dimensional process simulation
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1996
Journal Article
Titel
Three-dimensional process simulation
Author(s)
Lorenz, J.
Baccus, B.
Henke, W.
Zeitschrift
Microelectronic engineering
DOI
10.1016/S0167-9317(96)00011-1
Language
English
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IIS-B
Fraunhofer-Institut für Siliziumtechnologie ISIT