Publica
Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten. A thin film polysilicon-aluminium thermocouple
| Sensors and Materials : S and M 2 (1991), No.5, pp.247-251
ISSN: 0914-4935 |
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| English |
| Journal Article |
| Fraunhofer IFT; 2000 dem IZM eingegliedert |
| infrared detector; thermocouple |
Abstract
A thermocouple detector for infrared radiation is presented. The sensor is made with silicon planar technology. It has a diaphragm of silicon nitride, which is heated by the radiation. The temperature difference is measured by thermocouples of silicon and aluminium. The sensor has a sensitivity of E= 55 V/W and time constant of 15 ms.