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A thin film polysilicon-aluminium thermocouple
|Sensors and Materials : S and M 2 (1991), No.5, pp.247-251|
| Journal Article|
|Fraunhofer IFT; 2000 dem IZM eingegliedert|
| infrared detector; thermocouple|
A thermocouple detector for infrared radiation is presented. The sensor is made with silicon planar technology. It has a diaphragm of silicon nitride, which is heated by the radiation. The temperature difference is measured by thermocouples of silicon and aluminium. The sensor has a sensitivity of E= 55 V/W and time constant of 15 ms.