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  4. Thin film deposition by excimer laser evaporation.
 
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1990
Journal Article
Title

Thin film deposition by excimer laser evaporation.

Other Title
Dünnfilmabscheidung durch Excimer-Laser Verdampfung
Abstract
Laser pulse vapour deposition of carbon and gold films was performed by means of an excimer laser with uniform flux distribution across the spot. Structural and IR optical properties were investigated. The carbon film turned out to be suitable for coatings on IR optics elements, e.g. antireflection coatings on ZnSe.
Author(s)
Pompe, W.
Gorbunov, A.A.
Baranovka, G.K.
Klassen, N.V.
Konov, V.I.
Kulakov, M.P.
Prokhorov, A.M.
Weiß, H.-J.
Scheibe, H.J.
Journal
Thin solid films  
Language
English
Fraunhofer-Institut für Werkstoff- und Strahltechnik IWS  
Keyword(s)
  • antireflection coating

  • Antireflexionsschicht

  • DLC-film

  • laser-induced film evaporation

  • laser pulse vapor deposition

  • Laserimpulsgasphasenabscheidung

  • laserinduzierte Verdampfung

  • LPVD

  • reflection measurement

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