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1990
Journal Article
Titel
Thin film deposition by excimer laser evaporation.
Alternative
Dünnfilmabscheidung durch Excimer-Laser Verdampfung
Abstract
Laser pulse vapour deposition of carbon and gold films was performed by means of an excimer laser with uniform flux distribution across the spot. Structural and IR optical properties were investigated. The carbon film turned out to be suitable for coatings on IR optics elements, e.g. antireflection coatings on ZnSe.