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Thin film deposition by excimer laser evaporation.

Dünnfilmabscheidung durch Excimer-Laser Verdampfung

Thin solid films (1990), No.189, pp.283-291
ISSN: 0040-6090
Journal Article
Fraunhofer IWS ()
antireflection coating; Antireflexionsschicht; DLC-film; laser-induced film evaporation; laser pulse vapor deposition; Laserimpulsgasphasenabscheidung; laserinduzierte Verdampfung; LPVD; reflection measurement

Laser pulse vapour deposition of carbon and gold films was performed by means of an excimer laser with uniform flux distribution across the spot. Structural and IR optical properties were investigated. The carbon film turned out to be suitable for coatings on IR optics elements, e.g. antireflection coatings on ZnSe.