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A thin-film bolometer for radiation thermometry at ambient temperature

: Kühl, K.; Obermeier, E.; Lang, W.

Sensors and Actuators. A 22 (1990), No.1-3, pp.473-477
ISSN: 0924-4247
Journal Article
Fraunhofer IFT; 2000 dem IZM eingegliedert
Bolometer; IR-detector

A thin-film bolometer which has the advantages of batch processing and silicon technology is presented. The bolometer is designed for infrared radiation thermometry in the room temperature range. Special care was taken to allow precise compensation for the influence of the ambient temperature. A set of sensors with different geometries was fabricated. Their measurement characteristics can be understood with the help of a thermodynamic model. A sensitivity of E = 25 V/W was obtained together with a time constant of 12 ms. The noise equivalent power was NEP equal or smaller than 0.5 nV/square root H2.