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Thick polysilicon-based surface micromachined capacitive accelerometer with force feedback operation
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1995
Conference Paper
Titel
Thick polysilicon-based surface micromachined capacitive accelerometer with force feedback operation
Author(s)
Wenk, B.
Ramos-Martos, J.
Fehrenback, M.
Lange, P.
Offenberg, M.
Riethmüller, W.
Hauptwerk
Micromachined devices and components
Konferenz
Conference on Micromachined Devices and Components 1995
Language
English
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Fraunhofer-Institut für Siliziumtechnologie ISIT