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Thermally driven microvalve with buckling behaviour of pneumatic applications
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1994
Conference Paper
Title
Thermally driven microvalve with buckling behaviour of pneumatic applications
Author(s)
Lisec, T.
Hoerschelmann, S.
Quenzer, H.J.
Wagner, B.
Benecke, W.
Mainwork
MEMS '94. IEEE Workshop on Micro Electro Mechanical Systems
Conference
Workshop on Micro Electro Mechanical Systems (MEMS) 1994
DOI
10.1109/MEMSYS.1994.555590
Language
English
Fraunhofer-Institut für Siliziumtechnologie ISIT
