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Thermal diffusivity of diamond films synthesized from methane by ARC-discharge plasma-jet CVD

: Boudina, A.; Fitzer, E.; Netzelmann, U.; Reiss, H.


Diamond and Related Materials 2 (1993), pp.852
ISSN: 0925-9635
Journal Article
Fraunhofer IZFP ()
DC-plasma-jet CVD; Diamantfilm; diamond film; Mirage-Effekt; mirage-technique; raman spectroscopy; Ramanspektroskopie; SEM; thermal diffusivity; thermische Diffusivität; XPS; XRD

Diamond films of 10-36 fm thicknesses were synthesized via dc-plasma-jet CND. The films were separated from silicon substrates by dissolving the silicon in an aqueous HF. Examinations of a free standing diamond film by SEM, XRD, XPS, and Raman spectroscopy have shown that the quality of the films is close to that of natural diamond. The thermal diffusivities of the films were measured at room temperature by the thermal-wave mirage technique. This method allows local measurements representative for an area of about 1 mm2. The measured values were higher than those of copper and silicon