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Theoretical description of pulse laser deposition as a new thin film technique

: Völlmar, S.; Mai, H.; Dietsch, R.; Granse, G.; Lenk, A.

Institute of Electrical and Electronics Engineers -IEEE-:
CLEO Europe '94. Proceedings
New York/N.Y., 1994
ISBN: 0-7803-1789-0
Conference on Lasers and Electro-Optics Europe (CLEO Europe) <1, 1994, Amsterdam>
Conference Paper
Fraunhofer IWS ()
dünner Film; Laserimpulsabscheidung; multilayer; plasma modelling; Plasmamodellierung; pulse laser deposition; Röntgenspiegel; thin films; Vielfachschicht; X-ray mirror

Theoretical and experimental results are presented for the pulse laser deposition techniques. The properties of the particle flow are determined from the interaction of the laser beam with the solid and the expanding plasma plume