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Theoretical description of pulse laser deposition as a new thin film technique

: Völlmar, S.; Mai, H.; Dietsch, R.; Granse, G.; Lenk, A.

	Institute of Electrical and Electronics Engineers -IEEE-: CLEO Europe '94. Proceedings New York/N.Y., 1994 ISBN: 0-7803-1789-0
	Conference on Lasers and Electro-Optics Europe (CLEO Europe) <1, 1994, Amsterdam>

	English
	Conference Paper
	Fraunhofer IWS ()
	dünner Film; Laserimpulsabscheidung; multilayer; plasma modelling; Plasmamodellierung; pulse laser deposition; Röntgenspiegel; thin films; Vielfachschicht; X-ray mirror

Abstract
Theoretical and experimental results are presented for the pulse laser deposition techniques. The properties of the particle flow are determined from the interaction of the laser beam with the solid and the expanding plasma plume

: http://publica.fraunhofer.de/documents/PX-36291.html