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  4. Theoretical description of pulse laser deposition as a new thin film technique
 
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1994
Conference Paper
Title

Theoretical description of pulse laser deposition as a new thin film technique

Abstract
Theoretical and experimental results are presented for the pulse laser deposition techniques. The properties of the particle flow are determined from the interaction of the laser beam with the solid and the expanding plasma plume
Author(s)
Völlmar, S.
Mai, H.
Dietsch, R.
Granse, G.
Lenk, A.
Mainwork
CLEO Europe '94. Proceedings  
Conference
Conference on Lasers and Electro-Optics Europe (CLEO Europe) 1994  
Language
English
Fraunhofer-Institut für Werkstoff- und Strahltechnik IWS  
Keyword(s)
  • dünner Film

  • Laserimpulsabscheidung

  • multilayer

  • plasma modelling

  • Plasmamodellierung

  • pulse laser deposition

  • Röntgenspiegel

  • thin films

  • Vielfachschicht

  • X-ray mirror

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