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Theoretical considerations for a new tolerance system to characterise technical surfaces in the micro- and nanometer scale

: Westkämper, E.; Kraus, M.

Hasche, K.; Mirande, W.; Wilkening, G. ; Physikalisch-Technische Bundesanstalt -PTB-, Braunschweig:
Geometrical measurements in the micro- and nanometre range with far and near field methods
Bremerhaven: Wirtschaftsverlag NW, 1998 (PTB-Berichte: Fertigungsmeßtechnik F-34)
ISBN: 3-89701-280-4
Seminar on Quantitative Microscopy <3, 1998, Lyngby, Denmark>
Conference Paper
Fraunhofer IPA ()
Mikro- und Nanometerbereich; Oberflächeneigenschaften; Oberflächenprüfung; Toleranzsystem

The objective of this paper is to propose a new tolerance system in the micro- and nanometer scale. Based on the technical demands on the functionality of the workpiece in the manufacturing machines and measurement tools are chosen. Focusing on the micro- and nanometer scale, the machining and measurement conditions are defined and used to select the necessary parameters and tolerances to maintain the functionality of the manufactured sample. In addition, the parameters used in the new tolerance system are categorised in three groups to build up a useful parameter set with an optimal amount of parameters characterising surface properties and workpiece functionality.