Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.

Theoretical aspects for depth profiling by ARXPS.

Theoretische Aspekte für die Tiefenprofilanalyse mit winkelaufgelöster Röntgen-Photoelektron-Spektroskopie
: Richter, H.J.; Seelmann-Eggebert, M.

Journal of Electron Spectroscopy and Related Phenomena 52 (1990), pp.273-283 : Abb.,Tab.,Lit.
ISSN: 0368-2048
Journal Article
Fraunhofer IAF ()
angle-resolved for nondestructive depth profiling; nichtdestruktive Tiefenprofilanalyse; Röntgen-Photoelektronen-Spektroskopie; theoretical and limitations; theoretisches Potential und theoretische Grenzen; X-ray photoelectron spectroscopy

The potential and limitations of ARXPS in regard to depth-profiling is discussed with the emphasis on the theoretical treatment of multicomponent systems. We show, that the composition and the distribution of the phases constituting a sample cannot be independently obtained by any approach of depth profiling which is based on the analysis of components only. Experimental techniques of this type merely restrict the number, the composition, and the depth-sequence of phases, thus yielding a set of possible phase combinations and corresponding depth profiles. We introduce a general equation which relates the ARXPS signals of the analyzed components to the respective depth profile arbitrarily formed by these components. For the components a class of depth profiles can be deduced from the experimental data on the basis of this equation, however, the profiles within this class have to be considered experimentally undistinguishable for fundamental reasons. The equation considered is valid only under the condition that elastic scattering, reflection/refraction and lateral inhomogeneities are negligibly small. It is shown, that it is possible to check the experimental data for consistency with these neglections.