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Tailoring of surface properties by removal and deposition with laser radiation



Applied surface science 86 (1995), pp.266-277 : Abb.,Lit.
ISSN: 0169-4332
Journal Article
Fraunhofer ILT ()
capacitor; electro-forming; lithography; microsystem technology; moulding; photon-matter interaction

The tailoring of chemical, morphological, and mechanical surface properties with laser radiation is described on the basis of the understanding and control of photon-matter interaction. The removal of matter by thermal and non-thermal processes including etching, the deposition of multilayer thin films, and the photoresistless patterning by direct and indirect processing techniques are illustrated by examples.