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  4. Tailoring of surface properties by removal and deposition with laser radiation
 
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1995
Journal Article
Title

Tailoring of surface properties by removal and deposition with laser radiation

Abstract
The tailoring of chemical, morphological, and mechanical surface properties with laser radiation is described on the basis of the understanding and control of photon-matter interaction. The removal of matter by thermal and non-thermal processes including etching, the deposition of multilayer thin films, and the photoresistless patterning by direct and indirect processing techniques are illustrated by examples.
Author(s)
Kreutz, E.W.
Frerichs, H.
Mertin, M.
Wesner, D.A.
Pfleging, W.
Journal
Applied surface science  
DOI
10.1016/0169-4332(94)00396-3
Language
English
Fraunhofer-Institut für Lasertechnik ILT  
Keyword(s)
  • capacitor

  • electro-forming

  • lithography

  • microsystem technology

  • moulding

  • photon-matter interaction

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