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1995
Journal Article
Title
Tailoring of surface properties by removal and deposition with laser radiation
Abstract
The tailoring of chemical, morphological, and mechanical surface properties with laser radiation is described on the basis of the understanding and control of photon-matter interaction. The removal of matter by thermal and non-thermal processes including etching, the deposition of multilayer thin films, and the photoresistless patterning by direct and indirect processing techniques are illustrated by examples.