: Kreutz, E.W.; Frerichs, H.; Mertin, M.; Wesner, D.A.; Pfleging, W.

Abstract
The tailoring of chemical, morphological, and mechanical surface properties with laser radiation is described on the basis of the understanding and control of photon-matter interaction. The removal of matter by thermal and non-thermal processes including etching, the deposition of multilayer thin films, and the photoresistless patterning by direct and indirect processing techniques are illustrated by examples.