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Surface roughness and subsurface damage characterization of fused silica substrates

: Wuttig, A.; Steinert, J.; Duparre, A.; Truckenbrodt, H.

	Geyl, R. ; European Optical Society -EOS-; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.: Optical Fabrication and Testing Bellingham, Wash.: SPIE, 1999 (SPIE Proceedings Series 3739) ISBN: 0-8194-3213-X pp.369-376
	Conference on Optical Fabrication and Testing <1999, Berlin>

	English
	Conference Paper
	Fraunhofer IOF ()
	fused silica; light scattering; subsurface damage; surface polishing; surface roughness

Abstract
The surface microtopography and subsurface damage of fused silica have been examined after different stages of the manufacturing process. Results are presented of etching experiments and measurements performed by white light interferometry, atomic force microscopy and total light scattering.

: http://publica.fraunhofer.de/documents/PX-35428.html