• English
  • Deutsch
  • Log In
    Password Login
    Research Outputs
    Fundings & Projects
    Researchers
    Institutes
    Statistics
Repository logo
Fraunhofer-Gesellschaft
  1. Home
  2. Fraunhofer-Gesellschaft
  3. Konferenzschrift
  4. Surface roughness and subsurface damage characterization of fused silica substrates
 
  • Details
  • Full
Options
1999
Conference Paper
Title

Surface roughness and subsurface damage characterization of fused silica substrates

Abstract
The surface microtopography and subsurface damage of fused silica have been examined after different stages of the manufacturing process. Results are presented of etching experiments and measurements performed by white light interferometry, atomic force microscopy and total light scattering.
Author(s)
Wuttig, A.
Steinert, J.
Duparre, A.
Truckenbrodt, H.
Mainwork
Optical Fabrication and Testing  
Conference
Conference on Optical Fabrication and Testing 1999  
Language
English
Fraunhofer-Institut für Angewandte Optik und Feinmechanik IOF  
Keyword(s)
  • fused silica

  • light scattering

  • subsurface damage

  • surface polishing

  • surface roughness

  • Cookie settings
  • Imprint
  • Privacy policy
  • Api
  • Contact
© 2024