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Surface roughness and subsurface damage characterization of fused silica substrates

: Wuttig, A.; Steinert, J.; Duparre, A.; Truckenbrodt, H.

Geyl, R. ; European Optical Society -EOS-; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
Optical Fabrication and Testing
Bellingham, Wash.: SPIE, 1999 (SPIE Proceedings Series 3739)
ISBN: 0-8194-3213-X
Conference on Optical Fabrication and Testing <1999, Berlin>
Conference Paper
Fraunhofer IOF ()
fused silica; light scattering; subsurface damage; surface polishing; surface roughness

The surface microtopography and subsurface damage of fused silica have been examined after different stages of the manufacturing process. Results are presented of etching experiments and measurements performed by white light interferometry, atomic force microscopy and total light scattering.