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1995
Journal Article
Title

Surface micromachining

Title Supplement
UV lithography and electro deposition
Abstract
Among the many different fabrication techniques of microsystem technology, surface micromachining is most promising and developing fast. The 3D UV-microforming technique described here is of great interest because it fulfills the technological demands in a low-cost manner. Based on well-established processes, the method combines UV lithographic patterning of thick photoresist layers and a molding technique for the resulting resist patterns by electrodeposition. Both the UV lithography and the electrodeposition do not require any expensive or special equipment. 3D UV-microforming combines the simple manageability of optical photo-sensitive resist patterning with the advantage of large structure heights, otherwise only achieved by X-ray exposures or dry-etching methods.
Author(s)
Löchel, B.
Journal
The Electrochemical Society Interface  
Language
English
Fraunhofer-Institut für Siliziumtechnologie ISIT  
Keyword(s)
  • electrodeposition

  • micromachining

  • photolithography

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