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Surface micromachined pressure sensors with integrated CMOS read-out electronics


Transducers '93. 7th International Conference on Solid-State Sensors and Actuators. Digest of technical papers
ISBN: 4-9900247-2-9
International Conference on Solid-State Sensors and Actuators <7, 1993, Yokohama>
Conference Paper
Fraunhofer IMS ()
Drucksensor; Kondensator-Schalter-Filter; Oberflächenmikromechanik; pressure sensor; Pulsdauermodulation; pulse width modulation; surface micromachining; switched capacitor filter; temperature sensor

In this paper a single chip pressure and temperature sensor system with on chip electronics is presented. The capacitive pressure sensor is fabricated using a CMOS process with additional surface micromachining steps to form the membranes. The membrane dimensions have been optimized for a pressure range of 2, 4, 10 and 38 bars, respectively. For the signal processing switched capacitor circuits are used. The sensor signals are converted to a pulse width modulated output signal. The silicon chip has an active area of 3.5 mmü. Between 0xC and 80xC a temperature dependence of less than 200 ppm/xC was found.