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Surface micromachined piezoresistive pressure sensors with step-type and flat membrane structures
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1996
Journal Article
Titel
Surface micromachined piezoresistive pressure sensors with step-type and flat membrane structures
Author(s)
Lisec, T.
Kreutzer, M.
Wagner, B.
Zeitschrift
IEEE transactions on electron devices
DOI
10.1109/16.535348
Language
English
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Fraunhofer-Institut für Siliziumtechnologie ISIT