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A surface micromachined piezoresistive pressure sensor with high sensitivity
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1995
Conference Paper
Titel
A surface micromachined piezoresistive pressure sensor with high sensitivity
Author(s)
Lisec, T.
Kreutzer, M.
Wagner, B.
Hauptwerk
ESSDERC '95. 25th European Solid State Device Research Conference. Proceedings
Konferenz
European Solid State Device Research Conference 1995
Language
English
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Fraunhofer-Institut für Siliziumtechnologie ISIT