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A surface micromachined piezoresistive pressure sensor with high sensitivity

 
: Lisec, T.; Kreutzer, M.; Wagner, B.

Graaff, H.C. de; Kranburg, H. van:
ESSDERC '95. 25th European Solid State Device Research Conference. Proceedings
Editions Frontieres, 1995
ISBN: 2-86332-182-X
pp.339-342
European Solid State Device Research Conference <25, 1995, The Hague>
English
Conference Paper
Fraunhofer ISIT ()

: http://publica.fraunhofer.de/documents/PX-35406.html