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A surface micromachined piezoresistive pressure sensor with high sensitivity
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1995
Conference Paper
Title
A surface micromachined piezoresistive pressure sensor with high sensitivity
Author(s)
Lisec, T.
Kreutzer, M.
Wagner, B.
Mainwork
ESSDERC '95. 25th European Solid State Device Research Conference. Proceedings
Conference
European Solid State Device Research Conference 1995
Language
English
Fraunhofer-Institut für Siliziumtechnologie ISIT
