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Surface micromachined metallic microactuator with buckling characteristics

: Quenzer, H.J.; Maciossek, A.; Wagner, B.; Pott, H.

Foundation for Sensor and Actuator Technology, Stockholm:
8th International Conference on Solid-State Sensors and Actuators 1995 and Eurosensors IX. Digest of technical papers. Vol. 2. Sessions A7-D13. Papers No.232-496
Stockholm: Congrex, 1995
ISBN: 91-630-3473-5
International Conference on Solid-State Sensors and Actuators <8, 1995, Stockholm>
Eurosensors <9, 1995, Stockholm>
Conference Paper
Fraunhofer ISIT ()

This paper presents a new class of thermally driven actuators. Thermally induced buckling of metallic microbridges has been used for actuation. The heating elements were realised by an polysilicon layer, isolated by siliconoxide, under the metal. The micro bridge was manufactured by electroplating and finally completed by a sacrificial layer etching. Polysilicon was used as a sacrificial layer material. During heating of the polysilicon heaters, the high thermal expansion coefficient of the metallic bridge produces a large compressive stress and results in a buckling of the structure.