Surface micromachined high temperature pressure sensors on SIMOX-substrates

A new capacitive single chip pressure sensor for high temperature applications using SIMOX (Separation by IMplantation of OXygen) substrates is presented. The production steps are CMOS-compatible and allow on-chip integration of read-out electronics. Measurements have been performed in a temperature range from 50 deg C to 340 deg C. Two different types of sensors have been investigated with a pressure range of 38 bar and 85 bar, respectively.