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Surface micromachined high temperature pressure sensors on SIMOX-substrates

: Kasten, K.; Amelung, J.; Mokwa, W.

Bartek, M.:
Eurosensors XIII
The Hague: Inetlingua, 1999
ISBN: 90-76699-02-X
Eurosensors <13, 1999, The Hague>
Conference Paper
Fraunhofer IMS ()
Drucksensor; high-temperature; Hochtemperatur; pressure sensor; SIMOX; SIMOX-Technologie; surface micromachining

A new capacitive single chip pressure sensor for high temperature applications using SIMOX (Separation by IMplantation of OXygen) substrates is presented. The production steps are CMOS-compatible and allow on-chip integration of read-out electronics. Measurements have been performed in a temperature range from 50 deg C to 340 deg C. Two different types of sensors have been investigated with a pressure range of 38 bar and 85 bar, respectively.