Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.

Surface micromachined high temperature pressure sensors on SIMOX-substrates

 
: Kasten, K.; Amelung, J.; Mokwa, W.

Bartek, M.:
Eurosensors XIII
The Hague: Inetlingua, 1999
ISBN: 90-76699-02-X
pp.45-48
Eurosensors <13, 1999, The Hague>
English
Conference Paper
Fraunhofer IMS ()
Drucksensor; high-temperature; Hochtemperatur; pressure sensor; SIMOX; SIMOX-Technologie; surface micromachining

Abstract
A new capacitive single chip pressure sensor for high temperature applications using SIMOX (Separation by IMplantation of OXygen) substrates is presented. The production steps are CMOS-compatible and allow on-chip integration of read-out electronics. Measurements have been performed in a temperature range from 50 deg C to 340 deg C. Two different types of sensors have been investigated with a pressure range of 38 bar and 85 bar, respectively.

: http://publica.fraunhofer.de/documents/PX-35403.html