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Surface-micromachined electrostatic microrelay

 
: Schiele, I.; Huber, J.; Hillerich, B.; Kozlowski, F.

:

Middelhoek, S.:
Transducers '97. Proceedings of the 9th International Conference on Solid-State Sensors and Actuators
New York: Elsevier Science, 1998 (Sensors and actuators. A Physical)
ISSN: 0924-4247
pp.345-354 : Lit.
International Conference on Solid-State Sensors and Actuators <9, 1997, Chicago/Ill.>
English
Conference Paper
Fraunhofer IFT; 2000 dem IZM eingegliedert
electrostatic device; masks; microactuator; micromachining; photoresists; semiconductor relays; sputter etching

Abstract
Three variants of electrostatically driven microrelays are reported. These switches have a high off resistance like conventional mechanical relays, but are also characterized by a low power consumption (<10 mu W) and a very low switching time (<50 mu s). These microrelays consist of a cantilever beam, a fixed-fixed beam and a torsion beam with a double-contact configuration. Because of the complete fabrication by surface-micromachining technology, there is no need for a chip-bonding process. This paper reports on design considerations, device concept, fabrication and performance of the microrelay.

: http://publica.fraunhofer.de/documents/PX-35401.html