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Surface finish assessment of synthetic quartz glass

: Kiesel, A.; Duparre, A.; Haase, M.; Coriand, F.; Truckenbrodt, H.

France, C.; Gee, A.E.:
Specification, production, and testing of optical components and systems
Bellingham, Wash.: SPIE, 1996 (Europto series)
ISBN: 0-8194-2160-X
International Symposium on Optical Systems and Production <1996, Glasgow>
Conference Paper
Fraunhofer IOF ()
geschliffene Oberfläche; honed surface; Oberflächencharakterisierung; polierte Oberfläche; polished surface; subsurface damage; surface characterization; synthetic quartz glass; synthetisches Quarzglas; Tiefendefekt

Synthetic quartz glass surfaces have been examined after consecutive stages of the manufacturing process: cutting, flat honing, and polishing. Results are presented of microtopography investigations performed using several optical and non-optical methods such as optical and mechanical profilometry, atomic force microscopy , and integrated light scattering. Rms-roughness values have been determined for each step of the surface finishing process. Subsurface damage effects have been imaged by scanning electron microscopy.