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Surface disorder production during plasma immersion implantation

 
: Lohner, T.; Khanh, N.Q.; Petrik, P.; Biro, L.P.; Fried, M.; Pinter, I.; Lehnert, W.; Frey, L.; Ryssel, H.; Wentnik, D.J.; Gyulai, J.

Collins, R.W.:
Spectroscopic ellipsometry. Proceedings of the 2nd International Conference on Spectroscopic Ellipsometry 1997
Amsterdam: Elsevier, 1998 (Thin solid films 313-314)
pp.254-258
International Conference on Spectroscopic Ellipsometry (ICSE) <2, 1997, Charleston/SC>
English
Conference Paper
Fraunhofer IIS B ( IISB) ()

: http://publica.fraunhofer.de/documents/PX-35382.html