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The substrate-process interface in thin barrier film coating

Die Wechselwirkung Substrate-Prozeß in der Beschichtung mit dünnen Barriereschichten

Mattox, V.H. ; Society of Vacuum Coaters -SVC-, Albuquerque/NM:
Society of Vacuum Coaters. 39th Annual Technical Conference 1996. Proceedings
Albuquerque: SVC, 1996
ISSN: 0737-5921
Society of Vacuum Coaters (Annual Technical Conference) <39, 1996, Philadelphia>
Conference Paper
Fraunhofer ILV ( IVV) ()
Grenzflächencharakterisierung; interface characterization; Oberflächencharakterisierung; plasma characterization; Plasma-Charakterisierung; plasma-surface modification; surface characterization

For vacuum web coating for permeation barrier coatings in flexible packaging, the final functionality of the packaging media is extremely dependent on the whole chain of processing steps up to the final laminated packaging film. The most sensitive sector appears to be the hand-shake between substrate film pretreatment/substrate surface properties and the coating process with its characteristics: The influence of different surface pretreatment processes (Corona activation, oxygen and ammonia plasma treatment, UV-treatment) on OPP as substrate on active surface groups, together with - specifities of the thermal deposition (electron beam source) and the reactive deposition/microwave plasma process (plasma species, excitation characteristics, kinetic energies, obtained by in situ process monitoring) and finally, - structural properties (chemical composition, adhesion and oxygen permeation) of the thin barrier films (Al2O3 and SiOx) is shown.