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Study of Metal Containing Hydrogenated Carbon Films by STM/AFM and SAXS
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1997
Journal Article
Titel
Study of Metal Containing Hydrogenated Carbon Films by STM/AFM and SAXS
Author(s)
Schiffmann, K.
Fryda, M.
Goerigk, G.
Zeitschrift
Mikrochimica Acta
DOI
10.1007/BF01246171
Language
English
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Fraunhofer-Institut für Schicht- und Oberflächentechnik IST