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Studies on the lattice position of boron in silicon
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1983
Journal Article
Titel
Studies on the lattice position of boron in silicon
Author(s)
Fink, D.
Carstanjen, H.D.
Jahnel, F.
Muller, K.
Ryssel, H.
Osei, A.
Biersack, J.P.
Zeitschrift
Radiation effects
Language
English
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Dotierung
implantation
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