Publica
Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten. Structure, properties and applications for PVD Al2O3 layers - a comparison of deposition technologies
| Society of Vacuum Coaters -SVC-, Albuquerque/NM:
Society of Vacuum Coaters. 40th Annual Technical Conference 1997. Proceedings
Albuquerque, NM: SVC, 1997
ISSN: 0737-5921
pp.77-85 |
| Society of Vacuum Coaters (Annual Technical Conference) <40, 1997, New Orleans/La.> |
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| English |
| Conference Paper |
| Fraunhofer FEP () |