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Structure, properties and applications for PVD Al2O3 layers - a comparison of deposition technologies

 
: Hoetzsch, G.; Zywitzki, O.; Sahm, H.

Society of Vacuum Coaters -SVC-, Albuquerque/NM:
Society of Vacuum Coaters. 40th Annual Technical Conference 1997. Proceedings
Albuquerque, NM: SVC, 1997
ISSN: 0737-5921
pp.77-85
Society of Vacuum Coaters (Annual Technical Conference) <40, 1997, New Orleans/La.>
English
Conference Paper
Fraunhofer FEP ()

: http://publica.fraunhofer.de/documents/PX-35142.html