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Stress gradient and structural properties of the atmospheric and reduced pressure deposited polysilicon layers for micromechanical sensors

 
: Benrakkad, M.S.; Villegas, J.M.; Samitier, J.; Morante, J.R.; Kirsten, M.; Lange, P.

Sensors and Actuators. A 50 (1996), No.1
ISSN: 0924-4247
English
Journal Article
Fraunhofer ISIT ()

: http://publica.fraunhofer.de/documents/PX-35051.html