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  4. Stress gradient and structural properties of the atmospheric and reduced pressure deposited polysilicon layers for micromechanical sensors
 
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1996
Journal Article
Title

Stress gradient and structural properties of the atmospheric and reduced pressure deposited polysilicon layers for micromechanical sensors

Author(s)
Benrakkad, M.S.
Villegas, J.M.
Samitier, J.
Morante, J.R.
Kirsten, M.
Lange, P.
Journal
Sensors and Actuators. A  
Language
English
Fraunhofer-Institut für Siliziumtechnologie ISIT  
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