Publica
Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten. STM-Untersuchungen von Diamant- und DLC-Schichten
Siehe auch: Physica status solidi, A 145(1994), S.393-400.
STM Investigations of diamond and DLC-films
| Hecht, G. ; Societe Francaise du Vide -SFV-, Paris; Deutsche Vakuum-Gesellschaft:
Thin Films. Proceedings of the joint 4th International Symposium on Trends and New Applications in Thin Films TATF '94 and the 11th Conference on High Vacuum, Interfaces and Thin Films HVITF '94
Oberursel: DGM-Informationsgesellschaft, 1994
ISBN: 3-88355-199-6
pp.337-340 |
| International Symposium on Trends and New Applications in Thin Films (TATF) <4, 1994, Dresden>
Conference on High Vacuum, Interfaces and Thin Films (HVITF) <11, 1994, Dresden> |
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| German, English |
| Conference Paper |
| Fraunhofer IWS () |
| diamantähnlicher Kohlenstoff; Diamantschicht; diamond film; diamond films; diamond-like carbon; Raste-Tunnelmikroskopie; Rastertunnelmikroskopie; Rauhigkeit; roughness; scanning tunneling microscopy |
Abstract
Methodological problems of the applicability of scanning tunneling microscopy (STM) for the characterization of poorly conductive diamond and diamond-like carbon films are discussed. The sensitivity of STM to variation of the surface relief is characterized by a decay length d. It is shown that d depends on the serial resistance R of the sample seen by a tunneling microscope. For R<10 M Omega d is less than 1 nm that enables to image the samples with reasonable quality and correct reproduction of surface corrugations.