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Status of the compact synchrotron radiation source cosy and first exposure experiments

: Schmidt, M.; Oertel, D.W.; Hartrott, M.v.; Weihreter, E.; Oertel, H.K.; Huber, H.-L.


Microelectronic engineering 13 (1991), No.1-4, pp.291-294
ISSN: 0167-9317
International Conference on Microlithography: Microcircuit Engineering (ME) <16, 1990, Leuven>
Conference Paper
Fraunhofer ISIT ()

X-ray lithography (XRL) using synchrotron radiation is widely accepted to be a promising technique for the production of ULSI devices. One of the key components is a compact storage ring as light source. Most of the existing storage rings have been constructed for fundamental research purposes, and show a radius for the bending magnets of 1,8 meters and more. The demands for a production environment call for a maximum footprint of about 10 square meters and can be fulfilled by reducing the radius of the bending magnets to about 0,5 meters. The requirements on spectral distribution and intensity can then only be fulfilled with superconducting magnets. Therefore it has been decided to build a prototype of an electron storage ring COSY for the industrial application of XRL/1/ in a so-called racetrack design which is characterized by two 180 degrees superconducting magnets and two straight sections with focussing elements. To keep the cost and size of the injector, as well as the expense o f radiation shielding within reasonable limits, a racetrack microtron was chosen to inject electrons with an energy as low as 50 MeV. After a successful demonstration of low energy injection with normal conduction dipole magnets in the spring of 1988, the superconducting dipoles, made by Siemens/Interatom/2/, were installed in order to ramp the electron energy up to the designd energy value of 600 MeV. The first electron beam could be successfully stored in November 1988. In spire of problems due to the limited field quality of the dipole magnets, the studies of the injection process resulted in a stored beam with an accumulated current of 60 mA and a lifetime of 12 min. Recently, a stored beam could be ramped up to the lithographic usable energy of 550 MeV and first exposures could be performed /3/. In this paper the results of the pattern replications at COSY will be compared with simulations. Beam dimension and lifetime measurements will be presented and compared with theory.