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Status and progress of 3-D IC technology in Europe

: Joly, J.P.; Maes, H.; Seegebrecht, P.

Three-dimensional ICs and nano-meter functional devices. Extended Abstracts of the 8th International Workshop on Future Electron Devices
Future Electron Devices <8, 1990, Kochi>
Conference Paper
Fraunhofer IFT; 2000 dem IZM eingegliedert
dreidimensionale integrierte Schaltung; Jessi; Laserkristallisation; Prozeßintegration

This paper describes the recent development of process and device technologies for 3-D IC's in Europe. After a brief look back, a survey of the current status of research and development of 3-D integrated circuits at the main 3-D centers in Europe is given. A perspective view of 3-D IC research in Europe will be presented.