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Stability and electronic adjustment of ion images projected at 10 x reduction

 
: Brünger, W.H.; Buchmann, L.-M.; Torkler, M.

:

Journal of vacuum science and technology B. Microelectronics and nanometer structures 10 (1992), No.6, pp.2829-2833
ISSN: 0734-211X
ISSN: 1071-1023
English
Journal Article
Fraunhofer ISIT ()

: http://publica.fraunhofer.de/documents/PX-34564.html