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Special features of pulsed magnetron sputtering (PMS-process) glass coaters

 
: Schiller, S.; Kirchhoff, V.; Kopte, T.; Schulze, M.

Society of Vacuum Coaters -SVC-, Albuquerque/NM:
Society of Vacuum Coaters. 40th Annual Technical Conference 1997. Proceedings
Albuquerque, NM: SVC, 1997
ISSN: 0737-5921
pp.168-173
Society of Vacuum Coaters (Annual Technical Conference) <40, 1997, New Orleans/La.>
English
Conference Paper
Fraunhofer FEP ()

: http://publica.fraunhofer.de/documents/PX-34391.html