• English
  • Deutsch
  • Log In
    Password Login
    Research Outputs
    Fundings & Projects
    Researchers
    Institutes
    Statistics
Repository logo
Fraunhofer-Gesellschaft
  1. Home
  2. Fraunhofer-Gesellschaft
  3. Artikel
  4. Spanende Mikrobearbeitung für die Mikrooptik
 
  • Details
  • Full
Options
1998
Journal Article
Title

Spanende Mikrobearbeitung für die Mikrooptik

Other Title
Micro-machining for micro-optics
Abstract
Today, excellent methods are available for the production of micro-systems in the sub-micrometer range. However, in cases where structures measured in micrometers are adequate, classical machining methods such as milling, drilling and turning, in refined form, are also particularly suitable.
Author(s)
Gebhardt, A.
Journal
F und M. Feinwerktechnik, Mikrotechnik, Mikroelektronik  
Language
German
Fraunhofer-Institut für Angewandte Optik und Feinmechanik IOF  
Keyword(s)
  • Mikrostruktur

  • Mikrosystem

  • spanende Bearbeitung

  • Cookie settings
  • Imprint
  • Privacy policy
  • Api
  • Contact
© 2024