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Spanende Mikrobearbeitung für die Mikrooptik

Micro-machining for micro-optics
: Gebhardt, A.

F und M. Feinwerktechnik, Mikrotechnik, Mikroelektronik 106 (1998), No.4, pp.260-263
ISSN: 1437-9503
ISSN: 0944-1018
Journal Article
Fraunhofer IOF ()
Mikrostruktur; Mikrosystem; spanende Bearbeitung

Today, excellent methods are available for the production of micro-systems in the sub-micrometer range. However, in cases where structures measured in micrometers are adequate, classical machining methods such as milling, drilling and turning, in refined form, are also particularly suitable.