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  4. AFM helps engineer low-scatter thin films
 
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1998
Journal Article
Title

AFM helps engineer low-scatter thin films

Abstract
The paper dicusses several aspects of thin-film and substrate surface microstructures as they relate to scatter losses. Surface roughness and scatter are related through Power Spectral Density analysis of AFM roughness data. A practical way is shown how to predict scatter effects when PSD curves are known.
Author(s)
Duparre, A.
Kaiser, N.
Journal
Laser focus world  
Language
English
Fraunhofer-Institut für Angewandte Optik und Feinmechanik IOF  
Keyword(s)
  • atomic force microscopy

  • light scattering

  • microstructure

  • optical loss

  • surface roughness

  • thin film

  • UV coating

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