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AFM helps engineer low-scatter thin films

: Duparre, A.; Kaiser, N.

Laser focus world 34 (1998), No.4, pp.147-152
ISSN: 0740-2511
ISSN: 1043-8092
Journal Article
Fraunhofer IOF ()
atomic force microscopy; light scattering; microstructure; optical loss; surface roughness; thin film; UV coating

The paper dicusses several aspects of thin-film and substrate surface microstructures as they relate to scatter losses. Surface roughness and scatter are related through Power Spectral Density analysis of AFM roughness data. A practical way is shown how to predict scatter effects when PSD curves are known.