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A smart pressure transducer with on-chip readout, calibration and nonlinear temperature compensation based on spline functions

: Machul, O.; Hammerschmidt, D.; Brockherde, W.; Hosticka, B.J.; Obermeier, E.; Krause, P.

	Wuorinen, J.H.; Fujino, L.C. ; Institute of Electrical and Electronics Engineers -IEEE-: IEEE International Solid-State Circuits Conference 1997. Digest of technical papers New York: IEEE, 1997 ISSN: 0193-6350 ISBN: 0-7803-3721-2 ISBN: 0-7803-3722-0 ISBN: 0-7803-3723-9 ISBN: 0-7803-3724-7 pp.198-199
	International Solid-State Circuits Conference (ISSCC) <44, 1997, San Francisco/Calif.>

	English
	Conference Paper
	Fraunhofer IMS ()
	Druckmessung; Interpolation; Kalibrieren; Meßaufnehmer; Sensorauslese; Temperaturkompensation

Abstract
A smart pressure transducer with a piezo resistive sensor microbridge, digitally controlled readout electronics, and a nonlinear temperature compensation based on spline functions, is integrated on a single CMOS chip. The chip also contains a temperature sensor and control hardware for test and calibration functions. The calibration process of the sensing and temperature compensation parameters has been optimized for high volume production.

: http://publica.fraunhofer.de/documents/PX-34001.html