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1997
Conference Paper
Title
A smart pressure transducer with on-chip readout, calibration and nonlinear temperature compensation based on spline functions
Abstract
A smart pressure transducer with a piezo resistive sensor microbridge, digitally controlled readout electronics, and a nonlinear temperature compensation based on spline functions, is integrated on a single CMOS chip. The chip also contains a temperature sensor and control hardware for test and calibration functions. The calibration process of the sensing and temperature compensation parameters has been optimized for high volume production.