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A smart pressure transducer with on-chip readout, calibration and nonlinear temperature compensation based on spline functions


Wuorinen, J.H.; Fujino, L.C. ; Institute of Electrical and Electronics Engineers -IEEE-:
IEEE International Solid-State Circuits Conference 1997. Digest of technical papers
New York: IEEE, 1997
ISSN: 0193-6350
ISBN: 0-7803-3721-2
ISBN: 0-7803-3722-0
ISBN: 0-7803-3723-9
ISBN: 0-7803-3724-7
International Solid-State Circuits Conference (ISSCC) <44, 1997, San Francisco/Calif.>
Conference Paper
Fraunhofer IMS ()
Druckmessung; Interpolation; Kalibrieren; Meßaufnehmer; Sensorauslese; Temperaturkompensation

A smart pressure transducer with a piezo resistive sensor microbridge, digitally controlled readout electronics, and a nonlinear temperature compensation based on spline functions, is integrated on a single CMOS chip. The chip also contains a temperature sensor and control hardware for test and calibration functions. The calibration process of the sensing and temperature compensation parameters has been optimized for high volume production.