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Smart power technology with dielectric insulation. Processes and applications

	Hi-Tech Company, Warsaw: Mideuropean Symposium and Exhibition on Semiconductor Engineering and Technology. Polish science for industry. SET'92. Catalogue and symposium program Warsaw, 1992 pp.63-65
	Semiconductor Engineering and Technology <3, 1992, Warsaw>

	English
	Conference Paper
	Fraunhofer IMS ()
	dielectric isolation; power integrated circuit; SIMOX; Smart-power-Technik; smart power technology

Abstract
Smart Power processes with dielectric insulation will find a broad range of applications in automotive, industrial or off line circuits. Major insulation technologies are wafer bonding and high dose oxygen implantation. CMOS circuits have been integrated with 60 V - 1000 V power devices, driving currents uo to 10 A.